A 700-GHz MEMS Waveguide Switch

A low-loss microelectromechanical systems (MEMS) waveguide reflect switch is demonstrated operating across the WM-380 (WR-1.5) waveguide band. The design uses a large deflection MEMS actuator to mechanically obstruct a reduced height waveguide to create the switch. The MEMS device exhibits 3 dB of insertion loss across the band in the open state, over 20 dB of isolation when closed, and better than 20 dB of return loss. Lifetime testing of this device demonstrates 5.07 million cycles before it failed in the closed state.