Monolithic integration of light emitting diodes, detectors and optical fibers on a silicon wafer: a CMOS compatible optical sensor

Silicon light emitting diodes, detectors and optical fibers are monolithically integrated on a Silicon wafer for sensor applications. The Silicon LEDs are avalanche diodes reverse biased beyond the breakdown voltage. The fiber is a Silicon Nitride waveguide which is self aligned to the light emitter and the detector junctions through proper TEOS spacers for efficient optical coupling. The potential of the device as a CMOS compatible monolithic optical sensor is demonstrated.