A Compact Broadband Microwave Phase Detector Based on MEMS Technology

A compact broadband microwave phase detector based on the micro electromechanical systems technology is presented in this letter. Cascaded asymmetrical coplanar striplines are adopted to achieve broadband performance over the whole
$X$
-band and the occupied size is reduced by 60% through capacitive loadings. The measured phase detection sensitivities are rather stable for different frequencies at
$X$
-band and are larger than 16.6, 49.6, 74.9, 89.9, and 101.2
$\mu \text{V}$
/° at 10, 50, 100, 150, and 200-mW input powers, respectively. These results double our previous works. The relative errors between the measurement and the theory are <9%. Response times are all below 2 ms with RF signal stimulus at different frequencies.