A new I-V model for stress-induced leakage current including inelastic tunneling

A new I-V model to quantitatively represent stress-induced leakage current (SILC) is presented and compared with the experimental I-V characteristics. The trap-assisted tunneling model is modified so as to include the energy relaxation of tunneling electrons, which has been experimentally verified by applying the carrier separation technique to MOSFETs with the SILC component. The energy relaxation is treated in the new model as the change in the energy level of traps before and after the capture of electrons during two-step tunneling. It is demonstrated that this model successfully represents the experimental I-V characteristics of the SILC component and, particularly, the low apparent barrier height in the Fowler-Nordheim (FN) plot of the SILC component. The calculated low barrier height is attributed to the dominance of direct tunneling mechanism on both tunneling into traps and out of traps. The impact of the energy relaxation during tunneling, used in the present model, on the I-V characteristics is discussed in terms of the trap distribution inside the gate oxide, compared with conventional elastic tunneling model.