A monolithically integrated multi-sensor platform

The integration of multiple sensors on a single substrate is reported in this paper. A test chip was designed using the integration platform that implemented a capacitive inertial sensor, a capacitive absolute pressure sensor and a capacitive microphone. The sensors were tested after fabrication with the measured acceleration sensitivity of 10fF/g for a full scale acceleration of 2g and the pressure sensor sensitivity of 10fF/KPa for a full scale pressure of 1 atmosphere.