Electromagnetic analysis of micromachined devices

In this paper, the electromagnetic behaviour of micromachined devices aimed at operating at terahertz frequency is specially addressed. We considered respectively: (i) new fabrication techniques for free-standing air-bridged structures for planar device arrays; (ii) high-speed low-loss coplanar wave guides deposited on a membrane in GaAs technology; (iii) metallic/air photonic band gap structures used in filtering and guiding sections; and (iv) a radiating antenna deposited on low temperature grown GaAs used in pulse optical techniques for Terahertz generation.