Influence of Under-Metal Planes on Al

This study focuses on the crystallographic effects of under-metal planes on Al(111) orientation. it has been found that Al(111) preferred orientation is strongly dependent on the crystal structure and process sequence of the under-metal, and universally determined by the difference between the spacing of Al(111) plane and under-metal planes. For the first time, it is elucidated that the formation of under-metal layer with a plane whose spacing is close to that of the Al(111) plane is the most significant criterion to realize highly reliable layered Al interconnects.