Investigation of sensitive and restoring parameters for nanostructured Al2O3 based humidity sensors

The volumetric-surface variant of the capacitive MDM (metal-dielectric-metal) structure of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements was designed. The improved humidity sensitivity, reduced response and recovery time over a wide humidity range were obtained due to preparing of alumina membranes with open-ended and widened pores without the barrier layer. Such technological approach allows to eliminate the effect of the electrolyte anions embedded in pore walls on the adsorption and desorption processes in humidity sensing elements.