Optical waveguides in SIMOX structures

Propagation characteristics determined experimentally and theoretically for planar optical waveguides formed in separation by implantation of oxygen (SIMOX) structures are discussed. All samples were found to support both TE and TM modes at both 1.15 mu m and 1.523 mu m with a lowest propagation loss of 8 dB/cm. This loss was measured at a wavelength of 1.15 mu m for the TE/sub 0/ mode of a planar waveguide with a 2.0- mu m-thick Si guiding layer.