Integrating CAD tools for MEMS design

Microelectromechanical systems, or MEMS, is the generic name for a new class of microsystems. Typically, MEMS are: micron- to millimeter-scale devices with moving parts or containing fluids; parts that are batch fabricated using techniques derived from the semiconductor industry; used as sensors or actuators; and are often directly connected or integrated with ICs. The first MEMS design system, MEMCAD, was built in the Senturia Lab at MIT. Now at least three companies market commercial CAD systems for MEMS. The author discusses MEMCAD system's capabilities.