3D structure with opened cavities in low shrinkage LTCC

This paper is focused on design and fabrication of a three-dimensional (3D) structured module with opened cavities in Low Temperature Co-fired Ceramic (LTCC) substrate. The structure is built up by the uniaxial thermo-compression lamination. This process is one of the simplest, but it brings up some limitations for structure creating. It was also investigated effect of the pseudo-isostatic lamination. The Heraeus Heralock™ 2000 substrate with near zero shrinkage was used. The research goal is to find an optimal method of 3D structure with opened cavities production by means of error limiting and increasing reproducibility.