A study of the mechanical reliability of a MEMS microphone

This paper describes a failure analysis on a commercial MEMS microphone after a test according to the standard of Mil-Std-883. With the help of test and a finite element simulation, we find that the studied MEMS part of the microphone can survive a stress limit above 20000g normal to the diaphragm plane. Under a constant acceleration high to 30000g, the diaphragm breaks and the devices fail.