Germanium-on-Silicon Mid-Infrared Arrayed Waveguide Grating Multiplexers

In this letter, we describe the use of a germanium-on-silicon waveguide platform to realize an arrayed waveguide grating (AWG) operating in the 5 μm wavelength range, which can be used as a wavelength multiplexer for mid-infrared (midIR) light engines or as the core element of a midIR spectrometer. Ge-on-Si waveguide losses in the range 2.5-3.5 dB/cm for TE polarized light and 3-4 dB/cm for TM polarized light in the 5.15-5.4 μm wavelength range are reported. A 200 GHz channel spacing 5-channel AWG with an insertion loss/crosstalk of 2.5/3.1 dB and 20/16 dB for TE and TM polarization, respectively, is demonstrated.