Microfabrication and Metal Plating Technologies on Polytetrafluoroethylene Film Surface Treated by Atmospheric-Pressure Nonthermal-Plasma Graft Polymerization Process

Microfabrication by photolithography and nickel plating of fluoropolymer film, exposed to atmospheric-pressure nonthermal-plasma (NTP) graft polymerization, are investigated. Electroless nickel plating on the NTP-graft-polymerizationtreated polytetrafluoroethylene (PTFE) film is successfully achieved. Highly adhesive nickel plating is obtained by reverse bend test. Furthermore, photolithographic patterns are formed on the plated PTFE film. This process is expected to be applied to flexible printed substrates and millimeter-wave antenna.