Spiral inductors for V-band wireless ICs

This paper presents spiral inductors for V-band (50GHz-75GHz) wireless Integrated Circuits (ICs). The effects of variation of various design parameters of spiral inductors viz. number of turns, internal radius and width & spacing of metal turns on self resonant frequency and quality factor of inductor are studied. Based on the observations spiral inductor for V-band wireless ICs has been designed. The proposed 1.5 Turn spiral inductor, which has an internal radius of 11μm and spiral & underpass metal thicknesses of 0.3μm, gives an inductance of 6.6nH with a quality factor of 7.3 at 60GHz.