Gold passivated mechanically flexible interconnects (MFIs) with high elastic deformation

This paper reports the fabrication and testing of gold passivated mechanically flexible interconnects (MFIs) with elastic deformation of 65 μm. It is shown that the gold passivation plays a critical role in preserving the lifetime of the flexible interconnects. The gold-passivated MFIs exhibit an unchanged force-displacement characteristic after being vertically indented 100 cycles.