CoNiMnP-AAO hard magnetic nanocomposite film for MEMS applications

This paper presents a novel permanent magnetic CoNiMnP-AAO nanocomposite film comprising of a CoNiMnP nanowire array with a high aspect ratio (>;150). The nanocomposite synthesized by a low temperature electroplating process (at 30°C) with AAO template can exhibit a unique magnetic characteristic of vertical shape anisotropy which results in a coercivity (H
_c
) of 2512Oe, a remanence (B
_r
) up to 3616Gauss and a maximum energy product, (BH)
_max
, of 12.02kJ/m
³
. Such a simple fabrication process and excellent magnetic property reveal that permanent magnetic CoNiMnP-AAO nanocomposite is with great potential for magnetic N/MEMS applications.