Temporal modulation of x-rays using MEMS micromirrors

Investigations into temporal development of far-from-equilibrium processes can tremendously benefit from ultra-fast x-ray pulses with picosecond time resolution and high pulse repetition rates. Current x-ray modulation techniques fall short of providing solutions for generating such ultra-fast x-rays. However, x-ray modulators based on MEMS micromirrors are promising candidates for this challenge. Design, fabrication and characterization of such a micromirror are presented in this paper. Testing of this micromirror in an x-ray beamline demonstrates its feasibility for generating ultra-fast x-rays.