Special session 4A: New topics parametric yield and reliability of 3D integrated circuits: New challenges and solutions

Summary form only given. 3D integration is a promising new technology that offers numerous potential benefits including reduced wire length, high tier-to-tier bandwidth and low latency, and the possibility for heterogeneous integration of disparate technologies. As a result, 3D integrated circuits (IC) are being aggressively investigated as a potential replacement for conventional planar ICs in both academia and industry.