Film-substrate a-Si solar cells and their novel process technologies

A fabrication process of a double-junction amorphous silicon solar cell formed on a plastic film-substrate has been developed. The solar cell has a new monolithic series-connected structure named "SCAF" and is fabricated by a newly developed fabrication process including "Stepping-Roll" film deposition process. The details of the new process are presented and its advantage is described. We developed the new Stepping-Roll film deposition system composed of 6 CVD reactors and 2 sputtering reactors, and fabricated 109 SCAF cells successively as a pilot mass production. The results of the production are also presented and discussed.