Structure design on MEMS TiN resonant pressure sensors

A structure of TiN double resonant beams pressure sensor is presented, the pressure is measured through the relation between the resonant frequency of TiN resonant beams and the measured pressure. In this paper, the maths model of sensitive structures of the resonant sensor is established, through the analysis and numeration from the theory, and simulation by the ANSYS software, the varied extension of the length and the optimization of the beams are educed and the optimal position of the TiN resonant beam on the pressure membrane is confirmed.