A large travel piezoelectric motor nanopositioning system

A small-sized and large travel nanopositioning system was presented, the actuation characteristic of a piezoelectric motor with multi-claws was analyzed and tested. Considering the influence on nanopositioning of strike force caused by the piezoelectric motor's claws touching the ceramic rod of rotor or reaction force caused by the piezoelectric motor's claws returning with inertia to original point, a smoothing actuation algorithm with one of varied stepping distance actuation zone and one of actuation mode converting point was studied, by which the big positioning disturbance caused by strike force and reaction force were avoided, therefore the large travel actuation velocity of 0~1mm/s and 1nm positioning resolution with no overshoot were well met.