Biochemical sensing with an arrayed silicon nanowire platform

In this paper, we present our vision of a highly scalable arrayed biochemical sensor platform. This platform combines the advantages of refined and entrenched technologies like top-down integrated circuit fabrication and clinical assays with emerging technologies like three-dimensional stacking and label-free sensing. We demonstrate fabrication concepts and preliminary sensing results on ovarian cell lines prior to engaging in a discussion about relevant applications with regard to the exciting recent advances in genomics and oncology.