A CMOS digitized silicon condenser microphone for acoustic applications

In this paper, a CMOS digitized silicon condenser microphone for acoustic applications is newly proposed. The proposed digitized silicon condenser microphone is attractive due to that the sensing sensor and all the circuits are robust and compact to be integrated. Besides, another innovation of this proposed digitized silicon condenser microphone is that it could be operated without charge pump circuits. Thus, the sensing sensor and circuits can be performed at the same power supply. Based upon the device parameters of 0.35 μm 2P4M CMOS technology with 3 V power supply, measurement results have successfully verified the correct functions and performance of the proposed digitized silicon condenser microphone. The area of the proposed digitized silicon condenser microphone is 1444 × 1383 μm
²
and the power consumption is 6.1 mW. The proposed digitized silicon condenser microphone is suitable to be applied on mobile phones, laptops, PDAs, and hearing aids, etc.