Investigation on nonlinear distortion of acoustic devices for radio-frequency applications and its supression

In this paper, we discuss the nonlinear performance difference between surface acoustic wave (SAW) and bulk acoustic wave (BAW) resonators, which are inter-modulation-distortion (IMD) and triple-beat (TB) products, and indicate the importance to reduce even-order nonlinearity of BAW resonator. Then, we were able to validate the accuracy and efficiency of our proposed simulation technique on BAW devices by comparing our simulation with experimental data. We verified that our circuit model is a high-performance tool that can be used to predict BAW device nonlinearities. Finally, we produced the thin film bulk acoustic resonator (FBAR) duplexer with highly linear performances for wideband code division multiple access (WCDMA) band 1.