Small-Signal Response of Inversion Layers in High-Mobility $\hbox{In}_{0.53}\hbox{Ga}_{0.47}\hbox{As}$ MOSFETs Made With Thin High- $\kappa$ Dielectrics

Ultrahigh-mobility compound semiconductor-based MOSFETs and quantum-well field-effect transistors could enable the next generation of logic transistors operating at low supply voltages since these materials exhibit excellent electron transport properties. While the long-channel In
_0.53
Ga
_0.47
As MOSFETs exhibit promising characteristics with unpinned Fermi level at the InGaAs-dielectric interface, the high-field channel mobility as well as subthreshold characteristics needs further improvement. In this paper, we present a comprehensive equivalent circuit model that accurately evaluates the experimental small-signal response of inversion layers in In
_0.53
Ga
_0.47
As MOSFETs fabricated with LaAlO
₃
gate dielectric and enables accurate extraction of the interface state profile, the trap dynamics, and the effective channel mobility.