Design and Fabrication of AlGaN-Based Resonant-Cavity-Enhanced p-i-n UV PDs

AlGaN-based resonant-cavity-enhanced (RCE) p-i-n photodetectors (PDs) for operating at the wavelength of 330 nm were designed and fabricated. A 20.5-pair AlN/Al
_0.3
Ga
_0.7
N distributed Bragg reflector (DBR) was used as the back mirror and a 3-pair AlN/Al
_0.3
Ga
_0.7
N DBR as the front one. In the cavity is a p-GaN/i-GaN/n-Al
_0.3
Ga
_0.7
N structure. The optical absorption of the RCE PD structure is at most 59.8% deduced from reflectance measurement. Selectively enhanced by the cavity effect, a response peak of 0.128 A/W at 330 nm with a half-peak breadth of 5.5 nm was obtained under zero bias. The peak wavelength shifted 15 nm with the incident angle of light increasing from 0deg to 60deg.