Replication Techniques for Micro-Optics

In this paper we have investigated the molding and release parameters required for three- dimensional micro/nanofabrication in order to optimize the process and to apply it in the fabrication of micro/nano photonic structures. The replicas for various patterns (dots, lines, prism and lens) were obtained in polymethylmethacrylate (PMMA), epoxy resin and polydimethylsiloxane (PDMS) in different conditions for polymer coating and curing.