Optical Projection Lithography Status in 1981 and Trends for the Decade

At the end of the 1970's, optical projection printing technology was deeply entrenched in the semiconductor industry. The major thrusts came from 1:1 scanning systems using reflective optics, pioneered by Perkin-Elmer (PE), and direct stepping on wafers, made practical by the introduction of the DSW-4800 by GCA. This is a good time to reflect on the advantages of both approaches, review the physical factors limiting each type of equipment, and examine other possibilities.