A novel scanning Thermal Microscopy System

This paper describes a concept, fabrication and evaluation of a novel nano-meter scale Scanning Thermal Microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.