InGaN–GaN MQW Metal–Semiconductor–Metal Photodiodes With Semi-Insulating Mg-Doped GaN Cap Layers

InGaN-GaN multiple-quantum-well metal-semiconductor-metal photodiodes (PDs) with in situ grown 40-nm-thick unactivated semi-insulating Mg-doped GaN cap layer were successfully fabricated. The dark leakage current of this PD was comparably much smaller than that of conventional PD without the semi-insulating layer, because of a thicker and higher potential barrier of semi-insulating cap layer, and also a smaller number of surface states involved. For the PDs with the semi-insulating Mg-doped GaN cap layers, the responsivity at 380nm was 0.372A/W when biasing at 5 V. In short, incorporating a semi-insulating Mg-doped GaN cap layer into the PDs beneficially leads to the suppression of dark current and a corresponding improvement in the ultraviolet-to-visible rejection ratio