Fast Detection of Hydrogen at Room Temperature Using a Nanoparticle-integrated Microsensor

A novel nanoparticle-integrated hydrogen microsensor with a very fast response time at room temperature is presented in this work. The sensor was developed by integrating indium dioxide (ln
₂
O
₃
) doped polycrystalline tin dioxide (SnO
₂
) nano particles on interdigitated electrodes with a 5 mum spacing. In this sensor, we obtained a sensor response time as fast as 100 seconds with sensitivity as high as 3,700 for room temperature hydrogen detection.