Evaluation of InP Epi-ready wafers for epitaxial growth

The authors report on new X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) characterization results obtained on Epi-ready InP wafers as prepared with an optimized process and then stored in air for more than six months. They present a simplified molecular beam epitaxy oxide desorption procedure adapted to the new products. The quality of this procedure is demonstrated by the high performance of InAlAs/InGaAs high electron mobility transistor structures. The properties of the epitaxial structures prepared with different growth techniques are evaluated on the basis of secondary ion mass spectrometry results for residual impurities at epilayer-substrate interfaces.<
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