Controlled superconducting transition of YBaCuO thin films prepared by plasma-enhanced MOCVD

Several types of plasma-enhanced metalorganic chemical vapor deposition (MOCVD) systems are developed to prepare YBaCuO superconducting thin films. RF and microwave plasmas are used to enhance the decomposition of the source materials under moderated process conditions. Uniform YBaCuO films of large size were prepared with good reproducibility using a controlled material feeder.<
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