Poly-Si on glass technology for liquid crystal displays

Since the initial demonstration of poly-Si addressed liquid crystal displays with integrated drive circuits, based on high temperature integrated circuit processes on quartz substrates, there has been considerable interest in developing a comparable low temperature process for implementation on inexpensive glass substrates. In this paper the basic operating principles of an active matrix addressed flat panel display are summarised and the material property requirement, principally carrier mobility, for integrated drive circuits discussed. The principle features and issues of the monolithic and laser based hybrid approaches are reviewed.<
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