An improved technique of impedance measurement for thin film inductors over 10 MHz

The accuracy of the impedance measurement for thin-film inductors over 10 MHz is discussed. It is necessary for accurate measurement to prepare an appropriate fixture. A fixture with precise dimensions permits impedance matching between the inductor and the measurement instrument. The inductor is placed on a ground plane of microstrip line and it is connected to a network analyzer through a transmission line. An improved system has been developed to measure the impedance of thin-film inductors accurately up to 500 MHz.<
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