Highly Manufacturable 45nm LSTP CMOSFETs Using Novel Dual High-k and Dual Metal Gate CMOS Integration

This paper reports the first demonstration of dual high-k and dual metal gate (DHDMG) CMOSFETs meeting the device targets of 45nm low stand-by power (LSTP) node. This novel scheme has several advantages over the previously reported dual metal gate integration, enabling the high-k and metal gate processes to be optimized separately for N and PMOSFETs in order to maximize performance gain and process controllability. The proposed gate stack integration results in a symmetric short channel V
_t
of ~plusmn0.45V with >80% high field mobility for both N and PMOSFETs and significantly lower gate leakage compared to poly/SiON stack