Plasma processing of high T/sub c/ superconducting films

Summary Form only given, as follows. A method for plasma-assisted laser deposition of thin films has been developed by the authors and used to generate in-situ films at substrate temperatures between 400 degrees C and 500 degrees C without any postannealing. For Y-Ba-Cu-O superconductors, a zero-resistance temperature of about 90 K has been obtained for such substrate materials as SrTiO/sub 3/, ZrO/sub 2/, MgO, sapphire, Si, stainless steel, and Ni. Various surface and plasma analytical techniques have been applied to study the microstructure of the superconducting film and its interaction with the substrate and the plasma.<
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