Polymer Microrings Integrated with Thin Film InGaAs MSM Photodetectors for Sensor-On-a-Chip Applications

A polymer microring has been integrated with an InGaAs photodetector on a Si substrate for chip scale sensing applications. The photocurrent as a function of wavelength agrees well with the spectral response of the microring. This integration of a microring and photodetector onto Si is a first step toward the next generation of "sensor-on-a-chip" integrated systems