A rapid evaluation technique for porous silicon structures

Experiments designed to determine the feasibility of using field emission-SEM to characterize porous silicon (PS) are described. By modifying the anodizing conditions and the starting material type and resistivity, porous structures can be produced ranging from microporous (<2 nm) to macroporous (>20 nm). The resulting structures can then be characterized by gravimetric, BET and FE-SEM, while also investigating the limitations of BET and FE-SEM.<
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