A 65nm ultra low power logic platform technology using uni-axial strained silicon transistors

A leading edge 65nm logic process technology employing uni-axial strained silicon transistors has been optimized for ultra low power products. Record PMOS/NMOS drive currents of 0.38/0.66 mA/mum, respectively, have been achieved at 1.2V and off-state leakage of 100 pA/mum. Greater than 1000times reduction of SRAM cell standby leakage through implementation of sleep transistors and other leakage suppression schemes are also discussed