An evaluation of three simple scalable MIM capacitor models

This paper presents an evaluation of three different scalable metal-insulator-metal capacitor models for use in monolithic-microwave integrated-circuit design. The models, including one previously unpublished, are based on transmission-line theory and are easily scalable using only physical dimensions and constants. Comparisons to measured data for several device sizes, up to 45deg in electrical length, show that the three models exhibit similar performance, with a mean deviation between models and S
₁₁
measurements that is less than 3%