Effects of crystallization on trap state densities at grain boundaries in polycrystalline silicon

The relationship between crystallization processes in the formation of polycrystalline-silicon (poly-Si) films and trap state densities at grain boundaries is described. Three different crystallization techniques were used to obtain poly-Si films: 1) LPCVD, 2) solid-phase crystallization, and 3) laser recrystallization. Trap state densities in laser-recrystallized poly-Si are 9.2-9.6 × 10
¹¹
cm
^-2
, regardless of grain size. These values are half of those in LPCVD and solid-phase crystallized poly-Si. It is indicated quantitatively that laser-induced melting and the subsequent solidification process exert a significant influence on the electrical activity of silicon grain boundaries.