The design consideration on a meander-channel CCD

This paper describes some of the design consideration on a meander-channel CCD (MCCD). The design concept of the MCCD is different from that of conventional CCD's. Mask misalignment in fabrication process and narrow-channel effect must be taken into consideration. Mask misalignment induces the potential bump and dip near the boundary between the two electrodes. The narrow-channel effect induces the potential decrease at the bottleneck between the interdigitated channel stops. These problems are investigated by means of the analyses of potential in the buried MCCD. The model is based on a numerical solution of the two-dimensional Poisson's equation with the ideal electrode structure.