On-chip integrated SQUID readout for Superconducting bolometers

We present the first steps toward a 288 pixel sub-millimeter wavelength bolometer camera. We have used bolometers of the transition edge type, choosing a thermometer made of a proximity bilayer of Mo and the alloy Au/Pd with a designed transition temperature of about 500 mK. We have adapted our well-developed niobium based technology for SQUID manufacturing in order to be able to fabricate the current sensor and the bolometer on a common substrate. The function of both devices was successfully tested at the operating temperature of 300 mK.