Fabrication of discrete carbon nanotube based nano-scaled force sensors

We present a novel fabrication technique for discrete and released carbon nanotube based nano-mechanical force sensors. The simple fabrication technique involves pre-patterned coordinate markers used to align the device design to pre-deposited single walled carbon nanotubes (SWCNT): atomic force microscope (AFM) images are recorded to determine spatial orientation of each discrete nanotube to be integrated in a nano-scaled force sensor. Electron beam (e-beam) lithography is subsequently used to pattern the metallic electrodes for the nanoscale structures. Diluted HF etching followed by critical point drying finalizes the nano-sized device fabrication. We use discrete, highly purified and chemically stable CNT as active elements to reliably withstand HF release, rather than CNT grown by chemical vapor deposition (CVD). We show AFM and FESEM images to prove the successful realization and release of SWCNT embedded in true NEMS.