On-wafer LRM calibration technique using a non-reflecting lossy line of arbitrary length

In this paper, a straightforward de-embedding method is developed for on- wafer coplanar devices. Then the effect of the mechanical length of the reference line, utilized in the implementation of the Line-Reflect-Match LRM and Line-Reflect-Reflect-Match LRRM, on the free error scattering parameters is investigated. A method for moving the reference calibration plane at the end of the probe tips, without previous knowledge of the wave propagation constant of the line is developed in this work. The scattering parameters of coplanar PHEMTs and a pair of the coplanar 12.5 Ohm Load ( GGB industries calibration standard CS-5) are used for assessing the performance of each calibration technique. While commercially available calibration techniques LRM and LRRM use a short (loss-less and typically 1 ps) reference line, in this work the use of a reference line of arbitrary length and including losses is introduced.