Design, fabrication and testing of coplanar waveguide transmission lines for use in RF MEMS switches

The purpose of the paper is to discuss the design, fabrication, and testing of a set of coplanar waveguide (CPW) transmission lines being developed for use in RF MEMS (radio frequency microelectromechanical systems) with possible applications in seeker systems used in smart weapons. The waveguides were developed by the Weapon Sciences Directorate of the US Army Aviation and Missile Command, Aviation and Missile, Research, Development and Engineering Center and tested by the RF Technology Branch of the Applied Sensors, Guidance, and Electronics Directorate.