Characteristics of fractal dipole antennas integrated on Si for ULSI wireless interconnects

Characteristics of fractal dipole antennas, which were fabricated on silicon substrates for ultralarge scale integrated circuits (ULSI) wireless interconnects, were investigated. A pair of Sierpinski carpet dipole antennas, whose feature sizes were 1.0/spl times/1.9, 2.0/spl times/3.8 and 4.0/spl times/7.6 mm/sup 2/, respectively, were fabricated on a Si substrate with a resistivity of 10 /spl Omega/-cm. It was found that the Sierpinski carpet dipole antenna showed ultra-wideband performance so that its return loss was less than -10 dB in the frequency range of 6-26.5 GHz. Furthermore, the input impedance of the Sierpinski carpet dipole antenna was within VSWR<2 circle throughout the bandwidth of 6 GHz to 26.5 GHz.