Characterization of ferroelectric capacitors over wide frequency range

In this paper the transient response measurement method is presented which allows the characterization of ferroelectric capacitors for signal slew rates up to 800 MV/s. This method completes the Quasi Static Capacitance Voltage (QSCV) measurement and the Sawyer Tower measurement which is suitable for low and medium frequencies. The comparison of the results obtained by different measurement methods show the usability of the presented method.